DIGITAL EXPOSING DEVICE HAVING LIQUID SHUTTER ARRAY AND METHOD FOR EXPOSING USING THE SAME

In a digital exposure device including a liquid crystal shutter array and an exposure method using the same, the digital exposure device includes a light source unit, a shutter unit, and a lens unit. The light source unit provides a light source. The shutter unit is located below the light source un...

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Bibliographische Detailangaben
Hauptverfasser:	CHOI KEE BONG, LEE JAE JONG, NA JUN HEE, CHANG WON SEOK, CHANG SUNG HWAN, LIM HYUNG JUN, KIM GEE HONG, LEE WON SUB
Format:	Patent
Sprache:	eng ; kor
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR CINEMATOGRAPHY DEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH ISMODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THEDEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY,COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g.SWITCHING, GATING, MODULATING OR DEMODULATING ELECTROGRAPHY FREQUENCY-CHANGING HOLOGRAPHY MATERIALS THEREFOR NON-LINEAR OPTICS OPTICAL ANALOGUE/DIGITAL CONVERTERS OPTICAL LOGIC ELEMENTS OPTICS ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF
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Beschreibung
Zusammenfassung:	In a digital exposure device including a liquid crystal shutter array and an exposure method using the same, the digital exposure device includes a light source unit, a shutter unit, and a lens unit. The light source unit provides a light source. The shutter unit is located below the light source unit and includes a plurality of unit shutters arranged in a row along a first direction. The lens unit is located below the shutter unit and includes a unit lens aligned with each of the unit shutters. In the case, each of the unit shutters includes a liquid crystal layer of which the operation is independently controlled. 액정 셔터 어레이를 포함하는 디지털 노광장치 및 이를 이용한 노광방법에서, 상기 디지털 노광장치는 광원부, 셔터유닛 및 렌즈유닛을 포함한다. 상기 광원부는 광원을 제공한다. 상기 셔터유닛은 상기 광원부의 하부에 위치하며, 제1 방향을 따라 일렬로 배열되는 복수의 단위셔터들을 포함한다. 상기 렌즈유닛은 상기 셔터유닛의 하부에 위치하며, 상기 단위셔터들 각각에 정렬되는 단위렌즈를 포함한다. 이 경우, 상기 단위셔터들 각각은 독립적으로 구동이 제어되는 액정층을 포함한다.