IODINE-CONTAINING ACID CLEAVABLE COMPOUNDS POLYMERS DERIVED THEREFROM AND PHOTORESIST COMPOSITIONS

The present invention relates to a compound comprising an aromatic group or a heteroaromatic group, wherein the aromatic group or the heteroaromatic group comprises a first substituent comprising an ethylenically unsaturated double bond, a second substituent group being an iodine atom, and a third s...

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Bibliographische Detailangaben
Hauptverfasser:	AQAD EMAD, PARK JONG KEUN, LEE CHOONG BONG, CUI LI, CEN YINJIE, POPERE BHOOSHAN C
Format:	Patent
Sprache:	eng ; kor
Schlagworte:	ACYCLIC OR CARBOCYCLIC COMPOUNDS APPARATUS SPECIALLY ADAPTED THEREFOR CHEMISTRY CINEMATOGRAPHY COMPOSITIONS BASED THEREON ELECTROGRAPHY HOLOGRAPHY MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVINGCARBON-TO-CARBON UNSATURATED BONDS MATERIALS THEREFOR METALLURGY ORGANIC CHEMISTRY ORGANIC MACROMOLECULAR COMPOUNDS ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS THEIR PREPARATION OR CHEMICAL WORKING-UP
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Beschreibung
Zusammenfassung:	The present invention relates to a compound comprising an aromatic group or a heteroaromatic group, wherein the aromatic group or the heteroaromatic group comprises a first substituent comprising an ethylenically unsaturated double bond, a second substituent group being an iodine atom, and a third substituent comprising an acid labile group, and the first, second, and third substituents are respectively bonded to different carbon atoms of the aromatic group or the heteroaromatic group. 방향족 기 또는 헤테로방향족 기를 포함하는 화합물로서, 방향족 기 또는 헤테로방향족 기는 에틸렌계 불포화 이중 결합을 포함하는 제1 치환기, 요오드 원자인 제2 치환기, 및 산-불안정성 기를 포함하는 제3 치환기를 포함하고, 제1 치환기, 제2 치환기, 및 제3 치환기는 방향족 기 또는 헤테로방향족 기의 상이한 탄소 원자에 각각 결합된다.