FLOWMETER CALIBRATION SYSTEM SUBSTRATE PROCESSING APPARATUS AND FLOWMETER CALIBRATION METHOD

Provided is technology capable of labor saving in correction work of a flowmeter. A flowmeter correction system comprises: a processing liquid supply line supplying processing liquid to a substrate; a flowmeter detecting a flow amount value of the processing liquid; a processing liquid discharge lin...

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Bibliographische Detailangaben
Hauptverfasser:	OKUDA KATSUYA, HASHIMOTO YUSUKE, IKEBE RYOJI
Format:	Patent
Sprache:	eng ; kor
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY MEASURING MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUIDLEVEL METERING BY VOLUME PHYSICS SEMICONDUCTOR DEVICES TESTING
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Beschreibung
Zusammenfassung:	Provided is technology capable of labor saving in correction work of a flowmeter. A flowmeter correction system comprises: a processing liquid supply line supplying processing liquid to a substrate; a flowmeter detecting a flow amount value of the processing liquid; a processing liquid discharge line provided on a downstream side of the flowmeter and discharging the processing liquid; and a control unit controlling the processing liquid discharge line. The processing liquid discharge line comprises: a weighting tank storing the processing liquid; and a valve opening and closing a flow passage of the processing liquid discharged from the bottom portion to a lower side of the weighing tank. The control unit closes the flow passage of the processing liquid by using the valve and corrects the flow amount value of the flowmeter based on an amount of the processing liquid stored in the weighing tank. 유량계의 교정 작업을 생력화할 수 있는 기술을 제공한다. 유량계 교정 시스템은, 기판에 처리액을 공급하는 처리액 공급 라인과, 처리액의 유량값을 검출하는 유량계와, 유량계보다도 하류측에 마련되며 처리액을 배출하는 처리액 배출 라인과, 처리액 배출 라인을 제어하는 제어부를 구비한다. 처리액 배출 라인은, 처리액을 저류하는 칭량 탱크와, 칭량 탱크의 저부로부터 하방으로 배출되는 처리액의 유로를 개폐하는 밸브를 갖는다. 제어부는, 밸브에 의해 처리액의 유로를 폐쇄하여, 칭량 탱크에 저류되는 처리액의 양에 기초하여, 유량계의 유량값을 교정한다.