APPARATUS AND METHOD OF TRAPPING AN EXHAUST MATERIAL FROM A SUBSTRATE-PROCESSING PROCESS AND APPARATUS FOR PROCESSING A SUBSTRATE INCLUDING THE TRAPPING APPARATUS

An apparatus for trapping an exhaust material from a substrate processing process may include: a cyclone; a spraying module; and a trapping part. The cyclone may impart a swirling flow to the exhaust material exhausted from a process of processing a substrate using a reactive gas. The spraying modul...

Ausführliche Beschreibung

Gespeichert in:

Bibliographische Detailangaben
Hauptverfasser:	LEE UI HYOUNG, PARK HONG SIK, LEE TAE HEON, GIM SU JI
Format:	Patent
Sprache:	eng ; kor
Schlagworte:	APPARATUS USING FREE VORTEX FLOW, e.g. CYCLONES BASIC ELECTRIC ELEMENTS CENTRIFUGAL APPARATUS OR MACHINES FOR CARRYING-OUT PHYSICAL ORCHEMICAL PROCESSES CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY PERFORMING OPERATIONS SEMICONDUCTOR DEVICES SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION TRANSPORTING
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!

Beschreibung
Zusammenfassung:	An apparatus for trapping an exhaust material from a substrate processing process may include: a cyclone; a spraying module; and a trapping part. The cyclone may impart a swirling flow to the exhaust material exhausted from a process of processing a substrate using a reactive gas. The spraying module may provide spray to the inside of the cyclone to convert the exhaust material into powder through a wet oxidation reaction. The trapping part may trap the powder. Accordingly, the trapping efficiency of the exhaust material can be greatly improved. 기판 처리 공정의 배출 물질 포집 장치는 사이클론, 분무 모듈 및 수집부를 포함할 수 있다. 상기 사이클론은 반응 가스를 이용해서 기판을 처리하는데 공정에서 배출되는 배출 물질에 선회 흐름을 부여할 수 있다. 상기 분무 모듈은 상기 사이클론의 내부로 분무를 제공하여 상기 배출 물질을 습식 산화 반응을 통해서 파우더로 전환시킬 수 있다. 상기 수집부는 상기 파우더를 수집할 수 있다. 따라서, 배출 물질의 포집 효율이 크게 향상될 수 있다.