METHOD AND ELECTRONIC DEVICE FOR IDENTIFYING DEFECTS IN SEMICONDUCTOR WAFERS

The present invention relates to a method and electronic device for identifying a defect in a semiconductor wafer. The method includes: receiving, by the electronic device, a plurality of semiconductor wafer images of different sizes and/or quality; determining, by the electronic device, one operati...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: SHASHISHEKARA PARAMPALLI ADIGA, PRASHANT PANDURANG SHINDE, PRIYADARSHINI PANEMANGALORE PAI
Format: Patent
Sprache:eng ; kor
Schlagworte:
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!