SUBSTRATE TRANSFER SYSTEM WITH LAMP HEATER CHAMBER PURGE METHOD
A substrate transport system includes: a chamber in which a plurality of through holes are formed on a side surface; a substrate transport device provided in the chamber; and a lamp heater disposed in the chamber. The lamp heater is configured to heat the inner walls of the substrate transfer device...
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| Format: | Patent |
| Sprache: | eng ; kor |
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| Zusammenfassung: | A substrate transport system includes: a chamber in which a plurality of through holes are formed on a side surface; a substrate transport device provided in the chamber; and a lamp heater disposed in the chamber. The lamp heater is configured to heat the inner walls of the substrate transfer device and the chamber. The purpose of the present invention is to provide a substrate transport system and a chamber purge method for efficiently removing moisture adhering to the inner wall of a transport chamber.
기판 이송 시스템의 예시는, 복수의 관통 구멍이 측면 상에 형성되는 챔버, 챔버 내에 제공되는 기판 이송 장치, 및 챔버 내에 배치되는 램프 히터를 포함한다. 램프 히터는 챔버 및 기판 이송 장치의 내벽을 가열하도록 구성된다. |
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