Safe and convenient special supply system box for semiconductors

One embodiment of the present invention relates to a system box, wherein a plurality of inflow gas pipes connected to a main gas pipe and a plurality of supply gas pipes connected to a semiconductor manufacturing apparatus are connected to each other and the flow of the gas is controlled. The system...

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1. Verfasser: JUNG JAE EOK
Format: Patent
Sprache:eng ; kor
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Zusammenfassung:One embodiment of the present invention relates to a system box, wherein a plurality of inflow gas pipes connected to a main gas pipe and a plurality of supply gas pipes connected to a semiconductor manufacturing apparatus are connected to each other and the flow of the gas is controlled. The system box of the present invention comprises: a housing installed on the floor of a working floor rather than the floor on which the semiconductor manufacturing apparatus is installed, and formed such that an upper surface is opened and all lateral surfaces are sealed; a plurality of gas control units connecting the plurality of the inflow gas pipes and the plurality of supply gas pipes to each other inside the housing and including a valve unit and a filter unit that control the flow of the gas; a cover unit connected to a top surface of the housing and formed in a transparent form; and a plurality of light emission units connected to the outer side of the housing to operate according to the states of the gas control units. Accordingly, when a small amount of gas leaks in a field, the gas leakage can be more quickly checked. 본 발명의 일 실시예에 메인가스관과 연결되는 복수의 유입가스배관과 반도체제조장치와 연결되는 복수의 공급가스배관를 상호 연결하고 가스의 흐름을 제어하는 시스템 박스에 있어서, 상기 반도체제조장치가 설치된 바닥보다 근무층 바닥에 설치되고, 상면은 오픈되고 하면 및 측면은 모두 밀폐되도록 형성된 하우징, 상기 하우징 내부에서 상기 복수의 유입가스배관과 상기 복수의 공급가스배관 각각을 상호 연결하며 상기 가스의 흐름을 제어하는 밸브부와 필터부를 포함하는 복수의 가스제어부, 상기 하우징의 상면에 연결되고 투명하게 형성된 커버부 및 상기 하우징의 외측에 연결되어 상기 가스제어부의 상태에 따라 작동하는 복수의 발광부를 포함할 수 있다.