Method for preheating substrate treating apparatus and computer program therefor
예열 시간을 단축시킬 수 있고 메인터넌스 동작을 동시에 진행할 수 있는 기판 처리 장치의 예열 방법 및 이를 위한 컴퓨터 프로그램을 제공한다. 상기 기판 처리 장치의 예열 방법은, 기판 처리 장치를 구성하는 예열 대상의 예열과 관련된 파라미터를 설정하는 단계; 및 파라미터를 기초로 예열 대상을 예열시키는 단계를 포함하며, 예열 대상의 이동 범위는 이동 가능 범위 내에서 제한된다. Disclosed are a method for preheating a substrate treating apparatus capable of shorte...
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| creator | CHO CHEON SU KO WOO YOUNG |
| description | 예열 시간을 단축시킬 수 있고 메인터넌스 동작을 동시에 진행할 수 있는 기판 처리 장치의 예열 방법 및 이를 위한 컴퓨터 프로그램을 제공한다. 상기 기판 처리 장치의 예열 방법은, 기판 처리 장치를 구성하는 예열 대상의 예열과 관련된 파라미터를 설정하는 단계; 및 파라미터를 기초로 예열 대상을 예열시키는 단계를 포함하며, 예열 대상의 이동 범위는 이동 가능 범위 내에서 제한된다.
Disclosed are a method for preheating a substrate treating apparatus capable of shortening a preheating time and simultaneously performing a maintenance operation, and a computer program for the same. The method includes setting a parameter related to preheating of a preheating target component among components constituting the substrate treating apparatus; and preheating the preheating target component based on the set parameter, wherein a movement range of the preheating target component is limited to a value within a movable range. |
| format | Patent |
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Disclosed are a method for preheating a substrate treating apparatus capable of shortening a preheating time and simultaneously performing a maintenance operation, and a computer program for the same. The method includes setting a parameter related to preheating of a preheating target component among components constituting the substrate treating apparatus; and preheating the preheating target component based on the set parameter, wherein a movement range of the preheating target component is limited to a value within a movable range.</description><language>eng ; kor</language><subject>CORRECTION OF TYPOGRAPHICAL ERRORS ; DEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH ISMODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THEDEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY,COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g.SWITCHING, GATING, MODULATING OR DEMODULATING ; FREQUENCY-CHANGING ; i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME ; LINING MACHINES ; NON-LINEAR OPTICS ; OPTICAL ANALOGUE/DIGITAL CONVERTERS ; OPTICAL LOGIC ELEMENTS ; OPTICS ; PERFORMING OPERATIONS ; PHYSICS ; PRINTING ; SELECTIVE PRINTING MECHANISMS ; STAMPS ; TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF ; TRANSPORTING ; TYPEWRITERS</subject><creationdate>2023</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20230104&DB=EPODOC&CC=KR&NR=20230001278A$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,309,781,886,25568,76551</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20230104&DB=EPODOC&CC=KR&NR=20230001278A$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>CHO CHEON SU</creatorcontrib><creatorcontrib>KO WOO YOUNG</creatorcontrib><title>Method for preheating substrate treating apparatus and computer program therefor</title><description>예열 시간을 단축시킬 수 있고 메인터넌스 동작을 동시에 진행할 수 있는 기판 처리 장치의 예열 방법 및 이를 위한 컴퓨터 프로그램을 제공한다. 상기 기판 처리 장치의 예열 방법은, 기판 처리 장치를 구성하는 예열 대상의 예열과 관련된 파라미터를 설정하는 단계; 및 파라미터를 기초로 예열 대상을 예열시키는 단계를 포함하며, 예열 대상의 이동 범위는 이동 가능 범위 내에서 제한된다.
Disclosed are a method for preheating a substrate treating apparatus capable of shortening a preheating time and simultaneously performing a maintenance operation, and a computer program for the same. The method includes setting a parameter related to preheating of a preheating target component among components constituting the substrate treating apparatus; and preheating the preheating target component based on the set parameter, wherein a movement range of the preheating target component is limited to a value within a movable range.</description><subject>CORRECTION OF TYPOGRAPHICAL ERRORS</subject><subject>DEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH ISMODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THEDEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY,COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g.SWITCHING, GATING, MODULATING OR DEMODULATING</subject><subject>FREQUENCY-CHANGING</subject><subject>i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME</subject><subject>LINING MACHINES</subject><subject>NON-LINEAR OPTICS</subject><subject>OPTICAL ANALOGUE/DIGITAL CONVERTERS</subject><subject>OPTICAL LOGIC ELEMENTS</subject><subject>OPTICS</subject><subject>PERFORMING OPERATIONS</subject><subject>PHYSICS</subject><subject>PRINTING</subject><subject>SELECTIVE PRINTING MECHANISMS</subject><subject>STAMPS</subject><subject>TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF</subject><subject>TRANSPORTING</subject><subject>TYPEWRITERS</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2023</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNqNjEEKwjAQRbNxIeodBlwLMV3oVkQRRBBxX8b2txFsMiST-1uhB3D14PH-n5v7DepjS11MJAkerO_QUy6vrIkVpGlSLMKjKZk4tNTEQYriN4p94oHUI2F8WZpZx5-M1cSFWZ9Pz-NlA4k1snCDAK2vD2ddZa3dut3-UP1XfQHcXTj5</recordid><startdate>20230104</startdate><enddate>20230104</enddate><creator>CHO CHEON SU</creator><creator>KO WOO YOUNG</creator><scope>EVB</scope></search><sort><creationdate>20230104</creationdate><title>Method for preheating substrate treating apparatus and computer program therefor</title><author>CHO CHEON SU ; KO WOO YOUNG</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_KR20230001278A3</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>eng ; kor</language><creationdate>2023</creationdate><topic>CORRECTION OF TYPOGRAPHICAL ERRORS</topic><topic>DEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH ISMODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THEDEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY,COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g.SWITCHING, GATING, MODULATING OR DEMODULATING</topic><topic>FREQUENCY-CHANGING</topic><topic>i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME</topic><topic>LINING MACHINES</topic><topic>NON-LINEAR OPTICS</topic><topic>OPTICAL ANALOGUE/DIGITAL CONVERTERS</topic><topic>OPTICAL LOGIC ELEMENTS</topic><topic>OPTICS</topic><topic>PERFORMING OPERATIONS</topic><topic>PHYSICS</topic><topic>PRINTING</topic><topic>SELECTIVE PRINTING MECHANISMS</topic><topic>STAMPS</topic><topic>TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF</topic><topic>TRANSPORTING</topic><topic>TYPEWRITERS</topic><toplevel>online_resources</toplevel><creatorcontrib>CHO CHEON SU</creatorcontrib><creatorcontrib>KO WOO YOUNG</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>CHO CHEON SU</au><au>KO WOO YOUNG</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>Method for preheating substrate treating apparatus and computer program therefor</title><date>2023-01-04</date><risdate>2023</risdate><abstract>예열 시간을 단축시킬 수 있고 메인터넌스 동작을 동시에 진행할 수 있는 기판 처리 장치의 예열 방법 및 이를 위한 컴퓨터 프로그램을 제공한다. 상기 기판 처리 장치의 예열 방법은, 기판 처리 장치를 구성하는 예열 대상의 예열과 관련된 파라미터를 설정하는 단계; 및 파라미터를 기초로 예열 대상을 예열시키는 단계를 포함하며, 예열 대상의 이동 범위는 이동 가능 범위 내에서 제한된다.
Disclosed are a method for preheating a substrate treating apparatus capable of shortening a preheating time and simultaneously performing a maintenance operation, and a computer program for the same. The method includes setting a parameter related to preheating of a preheating target component among components constituting the substrate treating apparatus; and preheating the preheating target component based on the set parameter, wherein a movement range of the preheating target component is limited to a value within a movable range.</abstract><oa>free_for_read</oa></addata></record> |
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| subjects | CORRECTION OF TYPOGRAPHICAL ERRORS DEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH ISMODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THEDEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY,COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g.SWITCHING, GATING, MODULATING OR DEMODULATING FREQUENCY-CHANGING i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME LINING MACHINES NON-LINEAR OPTICS OPTICAL ANALOGUE/DIGITAL CONVERTERS OPTICAL LOGIC ELEMENTS OPTICS PERFORMING OPERATIONS PHYSICS PRINTING SELECTIVE PRINTING MECHANISMS STAMPS TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF TRANSPORTING TYPEWRITERS |
| title | Method for preheating substrate treating apparatus and computer program therefor |
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