CARBON DIOXIDE SUPPLY SYSTEM AND METHOD FOR SEMICONDUCTOR PROCESS

According to an embodiment of the present invention, a carbon dioxide supply system for semiconductor processing comprises: a transport container transporting liquid carbon dioxide having a first purity; a first analyzer analyzing quality of the liquid carbon dioxide transported by the transport con...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	KIM KI HYEON, PARK MYUNG BEOM, KIM JIN SOO, KANG DONG MIN, CHOI SAM JONG, LEE JUN YOUNG
Format:	Patent
Sprache:	eng ; kor
Schlagworte:	BASIC ELECTRIC ELEMENTS CLEANING CLEANING IN GENERAL ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING PERFORMING OPERATIONS PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL PHYSICS PREVENTION OF FOULING IN GENERAL SEMICONDUCTOR DEVICES SEPARATION TESTING TRANSPORTING
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