Carrier device for substrate inspection using magnetic repulsive force

The present invention relates to a carrier device for substrate inspection, capable of supporting a substrate to be inspected so that the substrate to be inspected keeps level with multiple probes descending from the upper part, by using a magnetic repulsive force. The carrier device for substrate i...

Ausführliche Beschreibung

Bibliographische Detailangaben

1. Verfasser:	HAN, JOO HUN
Format:	Patent
Sprache:	eng ; kor
Schlagworte:	MEASURING MEASURING ELECTRIC VARIABLES MEASURING MAGNETIC VARIABLES PHYSICS TESTING
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