REACTOR SYSTEMS AND METHODS FOR CLEANING REACTOR SYSTEMS

REACTOR SYSTEMS AND METHODS FOR CLEANING REACTOR SYSTEMS

A reactor system comprises a chemical substance storage assembly in fluid communication with all of a remote plasma unit and a bypass line for providing all of a plasma activated cleaning type and a non-plasma activated cleaning type to a reaction chamber. 반응 시스템은, 반응 챔버에 플라즈마 활성화된 세정 종 및 비-플라즈마 활성화...

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Bibliographische Detailangaben
Hauptverfasser: MUHAMMAD MUSTAFA, M'SAAD HI, MISHRA AMIT, MA PAUL, WINKLER JERELD LEE, LUNCEFORD CHAD, KUO YING SHEN, MOUSA MOATAZ BELLAH, ZHANG SHUAIDI
Format: Patent
Sprache:eng ; kor
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRICITY
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Beschreibung
Zusammenfassung:A reactor system comprises a chemical substance storage assembly in fluid communication with all of a remote plasma unit and a bypass line for providing all of a plasma activated cleaning type and a non-plasma activated cleaning type to a reaction chamber. 반응 시스템은, 반응 챔버에 플라즈마 활성화된 세정 종 및 비-플라즈마 활성화된 세정 종 모두를 제공하기 위해 원격식 플라즈마 유닛과 바이패스 라인 모두와 유체 연통하는, 화학물질 저장 어셈블리를 포함한다.