SUBSTARTE TRANSFER APPARATUS AND METHOD FOR PREVENTING WATER INFLOW THEREOF

A substrate transfer device includes: a lower insulating layer; an upper insulating layer disposed on the lower insulating layer; a plurality of conductive layers disposed between the lower insulating layer and the upper insulating layer and spaced apart from each other; and a plurality of holes def...

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Bibliographische Detailangaben
1. Verfasser:	KIM JONGHYUP
Format:	Patent
Sprache:	eng ; kor
Schlagworte:	BASIC ELECTRIC ELEMENTS DEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH ISMODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THEDEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY,COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g.SWITCHING, GATING, MODULATING OR DEMODULATING ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY FREQUENCY-CHANGING NON-LINEAR OPTICS OPTICAL ANALOGUE/DIGITAL CONVERTERS OPTICAL LOGIC ELEMENTS OPTICS PHYSICS SEMICONDUCTOR DEVICES TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF
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Beschreibung
Zusammenfassung:	A substrate transfer device includes: a lower insulating layer; an upper insulating layer disposed on the lower insulating layer; a plurality of conductive layers disposed between the lower insulating layer and the upper insulating layer and spaced apart from each other; and a plurality of holes defined from the upper surface of the upper insulating layer to a predetermined portion of the lower insulating layer and not overlapping with the conductive layers. Therefore, a waiting time for removing moisture inside the substrate transfer device is reduced, and the efficiency of a process can be improved. 기판 이송 장치는 하부 절연층, 상기 하부 절연층 상에 배치되는 상부 절연층, 상기 하부 절연층 및 상기 상부 절연층 사이에 배치되고, 서로 이격된 복수 개의 도전층들, 및 상기 상부 절연층의 상면으로부터 상기 하부 절연층의 소정의 부분까지 정의되고, 상기 도전층들과 중첩되지 않는 복수 개의 홀들을 포함할 수 있다.