LIFT PIN AND APPARATUS OF FABRICATING A SEMICONDUCTOR DEVICE HAING THE SAME

According to an embodiment of the present invention, a lift pin is provided. The lift pin comprises: a body part in which grooves disposed parallel to each other in a central axis direction are disposed along the circumferential direction of the central axis; and a head part disposed at one end of t...

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Bibliographische Detailangaben
Hauptverfasser:	KIM SUN CHEUL, KIM MIN SUNG, LEE SUN SOO, LIM HONG TAEK, SEO YONG CHEOL, KIM KANG JIN
Format:	Patent
Sprache:	eng ; kor
Schlagworte:	BASIC ELECTRIC ELEMENTS CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY SEMICONDUCTOR DEVICES SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
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Beschreibung
Zusammenfassung:	According to an embodiment of the present invention, a lift pin is provided. The lift pin comprises: a body part in which grooves disposed parallel to each other in a central axis direction are disposed along the circumferential direction of the central axis; and a head part disposed at one end of the body part and having a cross-section larger than a cross-section of the body part. The body part has a cross-section made of concave portions constituting the grooves and convex portions disposed between the concave portions. Each of the convex portions is inscribed on a circumference centered on the central axis. The convex portions have a radius of curvature of 15% to 33% of the diameter of the circumference. 본 발명의 일 실시예는, 중심축 방향으로 서로 나란하게 배치된 그루브들(grooves)이 중심축의 둘레 방향을 따라 배치된 몸체부; 및 상기 몸체부의 일단에 배치되며 상기 몸체부의 횡단면보다 큰 횡단면을 갖는 헤드부를 포함하며, 상기 몸체부는, 상기 그루브들을 각각 이루는 오목부들 및 상기 오목부들의 사이에 배치된 볼록부들로 이루어진 횡단면을 가지며, 상기 볼록부들은 상기 중심축을 중심으로 하는 원주에 각각 내접하며, 상기 볼록부는 상기 원주의 직경의 15% 내지 33%의 곡률반경을 갖는 리프트 핀을 제공한다.