Etching device and etching method using the same

An etching system according to one embodiment of the present invention comprises: a chamber; a support unit located inside the chamber; a heater located inside the support; and a coating unit located on the support unit, wherein, on the support unit, provided is glass. The application unit allows th...

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Bibliographische Detailangaben
Hauptverfasser: RYOU HANSUN, JUNG JAE HOON, KIM JINSEOCK, KIM KYU YOUNG, YANG SEUNGYO, JO JUNGKYU, YOON BYUNG SEO, HEO JINNYOUNG
Format: Patent
Sprache:eng ; kor
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Beschreibung
Zusammenfassung:An etching system according to one embodiment of the present invention comprises: a chamber; a support unit located inside the chamber; a heater located inside the support; and a coating unit located on the support unit, wherein, on the support unit, provided is glass. The application unit allows the glass to be coated with an etchant, wherein, from the center to the edge of the glass, the coating thickness of the etchant gradually decreases due to surface tension. 일 실시예에 따른 식각 장치는 챔버, 상기 챔버 내에 위치하는 지지부, 상기 지지부 내에 위치하는 히터, 상기 지지부 위에 위치하는 도포부를 포함하고, 상기 지지부 위에 글래스가 위치하며, 상기 도포부는 상기 글래스 위에 식각액을 도포하고, 상기 식각액은 표면 장력에 의해 상기 글래스의 중앙에서 가장자리로 갈수록 두께가 얇아지도록 도포된다.