MANAGEMENT SYSTEM AND METHOD FOR GRINDING WHEEL

The present invention relates to a system and a method for managing a grinding wheel, which can prevent product defects caused by a grinding wheel or contaminants on the surface of the grinding wheel during a double side grinding (DSG) process. The system for managing a grinding wheel comprises: a c...

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Bibliographische Detailangaben
1. Verfasser:	KANG CHI HUN
Format:	Patent
Sprache:	eng ; kor
Schlagworte:	CLEANING CLEANING IN GENERAL DRESSING OR CONDITIONING OF ABRADING SURFACES FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS GRINDING MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING PERFORMING OPERATIONS POLISHING PREVENTION OF FOULING IN GENERAL TRANSPORTING
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Beschreibung
Zusammenfassung:	The present invention relates to a system and a method for managing a grinding wheel, which can prevent product defects caused by a grinding wheel or contaminants on the surface of the grinding wheel during a double side grinding (DSG) process. The system for managing a grinding wheel comprises: a contamination detection unit which measures a contamination status of the surface of a wheel which grinds a wafer; a cleaning unit which cleans the surface of the wheel; a dressing unit which performs dressing on the wheel; and a processing unit which controls the operation of the contamination detection unit, the cleaning unit, and the dressing unit. The system for managing a grinding wheel controls the cleaning unit and the dressing unit based on information acquired through the contamination detection unit. 본 발명은 DSG(Double Side Grinding) 공정에서 연삭 휠(Wheel) 표면의 오염물이나 연삭 휠로 인해 발생할 수 있는 제품 불량 문제를 방지하도록 구성한 연삭 휠 관리 시스템 및 방법에 관한 것으로서, 보다 상세하게는, 웨이퍼를 연삭시키는 상기 휠 표면의 오염 상태를 측정하는 오염감지부; 상기 휠 표면을 청소하는 세척부; 상기 휠에 대한 드레싱(Dressing)을 수행하는 드레싱부; 및 상기 오염감지부, 상기 세척부 및 상기 드레싱부의 동작을 제어하는 처리부;를 포함하며, 상기 오염감지부를 통해 취득된 정보를 바탕으로 상기 세척부와 상기 드레싱부를 제어하는 연삭 휠 관리 시스템 및 방법에 관한 것이다.