TRANSFER UNIT AND SUBSTRATE TREATING APPARATUS INCLUDING THE SAME
The present invention relates to a transfer unit. The transfer unit includes: a support body; a hand on which a substrate is placed; a support rod supporting the hand; and a guide rail provided on the support body and guiding movement of the support rod supporting the hand. The support body includes...
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| creator | SUN JIN SUNG HAN KIWON KONG TAE KYUNG |
| description | The present invention relates to a transfer unit. The transfer unit includes: a support body; a hand on which a substrate is placed; a support rod supporting the hand; and a guide rail provided on the support body and guiding movement of the support rod supporting the hand. The support body includes: a driving part for applying a driving force to the support rod to move the hand; a body in which the driving part is disposed; and a plurality of cables connected to the driving part to transmit the driving force. The plurality of cables are positioned on an external path of the body.
본 발명은 지지체와; 기판이 놓이는 핸드와; 상기 핸드를 지지하는 지지 로드와; 상기 지지체에 제공되며, 상기 핸드를 지지하는 상기 지지 로드의 이동을 안내하는 가이드 레일을 포함하고, 상기 지지체는, 상기 지지 로드에 구동력을 인가하여 상기 핸드를 이동시키는 구동부와; 내부에 상기 구동부가 배치되는 몸체와; 상기 구동부와 연결되어 상기 구동력을 전달하는 복수의 케이블을 포함하고, 상기 복수의 케이블은 상기 몸체의 외부 경로 상에 위치되는 반송 유닛에 관한 것이다. |
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본 발명은 지지체와; 기판이 놓이는 핸드와; 상기 핸드를 지지하는 지지 로드와; 상기 지지체에 제공되며, 상기 핸드를 지지하는 상기 지지 로드의 이동을 안내하는 가이드 레일을 포함하고, 상기 지지체는, 상기 지지 로드에 구동력을 인가하여 상기 핸드를 이동시키는 구동부와; 내부에 상기 구동부가 배치되는 몸체와; 상기 구동부와 연결되어 상기 구동력을 전달하는 복수의 케이블을 포함하고, 상기 복수의 케이블은 상기 몸체의 외부 경로 상에 위치되는 반송 유닛에 관한 것이다.</description><language>eng ; kor</language><subject>BASIC ELECTRIC ELEMENTS ; CHAMBERS PROVIDED WITH MANIPULATION DEVICES ; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ; ELECTRICITY ; HAND TOOLS ; MANIPULATORS ; PERFORMING OPERATIONS ; PORTABLE POWER-DRIVEN TOOLS ; SEMICONDUCTOR DEVICES ; TRANSPORTING</subject><creationdate>2022</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20220705&DB=EPODOC&CC=KR&NR=20220094021A$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,309,781,886,25565,76548</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20220705&DB=EPODOC&CC=KR&NR=20220094021A$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>SUN JIN SUNG</creatorcontrib><creatorcontrib>HAN KIWON</creatorcontrib><creatorcontrib>KONG TAE KYUNG</creatorcontrib><title>TRANSFER UNIT AND SUBSTRATE TREATING APPARATUS INCLUDING THE SAME</title><description>The present invention relates to a transfer unit. The transfer unit includes: a support body; a hand on which a substrate is placed; a support rod supporting the hand; and a guide rail provided on the support body and guiding movement of the support rod supporting the hand. The support body includes: a driving part for applying a driving force to the support rod to move the hand; a body in which the driving part is disposed; and a plurality of cables connected to the driving part to transmit the driving force. The plurality of cables are positioned on an external path of the body.
본 발명은 지지체와; 기판이 놓이는 핸드와; 상기 핸드를 지지하는 지지 로드와; 상기 지지체에 제공되며, 상기 핸드를 지지하는 상기 지지 로드의 이동을 안내하는 가이드 레일을 포함하고, 상기 지지체는, 상기 지지 로드에 구동력을 인가하여 상기 핸드를 이동시키는 구동부와; 내부에 상기 구동부가 배치되는 몸체와; 상기 구동부와 연결되어 상기 구동력을 전달하는 복수의 케이블을 포함하고, 상기 복수의 케이블은 상기 몸체의 외부 경로 상에 위치되는 반송 유닛에 관한 것이다.</description><subject>BASIC ELECTRIC ELEMENTS</subject><subject>CHAMBERS PROVIDED WITH MANIPULATION DEVICES</subject><subject>ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR</subject><subject>ELECTRICITY</subject><subject>HAND TOOLS</subject><subject>MANIPULATORS</subject><subject>PERFORMING OPERATIONS</subject><subject>PORTABLE POWER-DRIVEN TOOLS</subject><subject>SEMICONDUCTOR DEVICES</subject><subject>TRANSPORTING</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2022</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNrjZHAMCXL0C3ZzDVII9fMMUXD0c1EIDnUKBoqGuCqEBLk6hnj6uSs4BgQ4AkVCgxU8_Zx9Ql1AYiEergrBjr6uPAysaYk5xam8UJqbQdnNNcTZQze1ID8-tbggMTk1L7Uk3jvIyMDIyMDA0sTAyNDRmDhVAJUsK9g</recordid><startdate>20220705</startdate><enddate>20220705</enddate><creator>SUN JIN SUNG</creator><creator>HAN KIWON</creator><creator>KONG TAE KYUNG</creator><scope>EVB</scope></search><sort><creationdate>20220705</creationdate><title>TRANSFER UNIT AND SUBSTRATE TREATING APPARATUS INCLUDING THE SAME</title><author>SUN JIN SUNG ; HAN KIWON ; KONG TAE KYUNG</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_KR20220094021A3</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>eng ; kor</language><creationdate>2022</creationdate><topic>BASIC ELECTRIC ELEMENTS</topic><topic>CHAMBERS PROVIDED WITH MANIPULATION DEVICES</topic><topic>ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR</topic><topic>ELECTRICITY</topic><topic>HAND TOOLS</topic><topic>MANIPULATORS</topic><topic>PERFORMING OPERATIONS</topic><topic>PORTABLE POWER-DRIVEN TOOLS</topic><topic>SEMICONDUCTOR DEVICES</topic><topic>TRANSPORTING</topic><toplevel>online_resources</toplevel><creatorcontrib>SUN JIN SUNG</creatorcontrib><creatorcontrib>HAN KIWON</creatorcontrib><creatorcontrib>KONG TAE KYUNG</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>SUN JIN SUNG</au><au>HAN KIWON</au><au>KONG TAE KYUNG</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>TRANSFER UNIT AND SUBSTRATE TREATING APPARATUS INCLUDING THE SAME</title><date>2022-07-05</date><risdate>2022</risdate><abstract>The present invention relates to a transfer unit. The transfer unit includes: a support body; a hand on which a substrate is placed; a support rod supporting the hand; and a guide rail provided on the support body and guiding movement of the support rod supporting the hand. The support body includes: a driving part for applying a driving force to the support rod to move the hand; a body in which the driving part is disposed; and a plurality of cables connected to the driving part to transmit the driving force. The plurality of cables are positioned on an external path of the body.
본 발명은 지지체와; 기판이 놓이는 핸드와; 상기 핸드를 지지하는 지지 로드와; 상기 지지체에 제공되며, 상기 핸드를 지지하는 상기 지지 로드의 이동을 안내하는 가이드 레일을 포함하고, 상기 지지체는, 상기 지지 로드에 구동력을 인가하여 상기 핸드를 이동시키는 구동부와; 내부에 상기 구동부가 배치되는 몸체와; 상기 구동부와 연결되어 상기 구동력을 전달하는 복수의 케이블을 포함하고, 상기 복수의 케이블은 상기 몸체의 외부 경로 상에 위치되는 반송 유닛에 관한 것이다.</abstract><oa>free_for_read</oa></addata></record> |
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| subjects | BASIC ELECTRIC ELEMENTS CHAMBERS PROVIDED WITH MANIPULATION DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY HAND TOOLS MANIPULATORS PERFORMING OPERATIONS PORTABLE POWER-DRIVEN TOOLS SEMICONDUCTOR DEVICES TRANSPORTING |
| title | TRANSFER UNIT AND SUBSTRATE TREATING APPARATUS INCLUDING THE SAME |
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