TRANSFER UNIT AND SUBSTRATE TREATING APPARATUS INCLUDING THE SAME

The present invention relates to a transfer unit. The transfer unit includes: a support body; a hand on which a substrate is placed; a support rod supporting the hand; and a guide rail provided on the support body and guiding movement of the support rod supporting the hand. The support body includes...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	SUN JIN SUNG, HAN KIWON, KONG TAE KYUNG
Format:	Patent
Sprache:	eng ; kor
Schlagworte:	BASIC ELECTRIC ELEMENTS CHAMBERS PROVIDED WITH MANIPULATION DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY HAND TOOLS MANIPULATORS PERFORMING OPERATIONS PORTABLE POWER-DRIVEN TOOLS SEMICONDUCTOR DEVICES TRANSPORTING
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Beschreibung
Zusammenfassung:	The present invention relates to a transfer unit. The transfer unit includes: a support body; a hand on which a substrate is placed; a support rod supporting the hand; and a guide rail provided on the support body and guiding movement of the support rod supporting the hand. The support body includes: a driving part for applying a driving force to the support rod to move the hand; a body in which the driving part is disposed; and a plurality of cables connected to the driving part to transmit the driving force. The plurality of cables are positioned on an external path of the body. 본 발명은 지지체와; 기판이 놓이는 핸드와; 상기 핸드를 지지하는 지지 로드와; 상기 지지체에 제공되며, 상기 핸드를 지지하는 상기 지지 로드의 이동을 안내하는 가이드 레일을 포함하고, 상기 지지체는, 상기 지지 로드에 구동력을 인가하여 상기 핸드를 이동시키는 구동부와; 내부에 상기 구동부가 배치되는 몸체와; 상기 구동부와 연결되어 상기 구동력을 전달하는 복수의 케이블을 포함하고, 상기 복수의 케이블은 상기 몸체의 외부 경로 상에 위치되는 반송 유닛에 관한 것이다.