OXYGEN GAS SENSOR UNIT AND SUBSTRATE PROCESSING SYSTEM HAVING THE SAME

An oxygen sensor unit for detecting an oxygen concentration of a transfer chamber according to one embodiment of the present invention comprises: an oxygen sensor unit which is disposed on a valve line of the transfer chamber and which measures the oxygen concentration of the transfer chamber; a fir...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	CHOI DONG SIK, HEO JUN
Format:	Patent
Sprache:	eng ; kor
Schlagworte:	BASIC ELECTRIC ELEMENTS COLORIMETRY ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT,POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED,VISIBLE OR ULTRA-VIOLET LIGHT MEASURING PHYSICS RADIATION PYROMETRY SEMICONDUCTOR DEVICES TESTING
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