OXYGEN GAS SENSOR UNIT AND SUBSTRATE PROCESSING SYSTEM HAVING THE SAME

An oxygen sensor unit for detecting an oxygen concentration of a transfer chamber according to one embodiment of the present invention comprises: an oxygen sensor unit which is disposed on a valve line of the transfer chamber and which measures the oxygen concentration of the transfer chamber; a fir...

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Bibliographische Detailangaben
Hauptverfasser:	CHOI DONG SIK, HEO JUN
Format:	Patent
Sprache:	eng ; kor
Schlagworte:	BASIC ELECTRIC ELEMENTS COLORIMETRY ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT,POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED,VISIBLE OR ULTRA-VIOLET LIGHT MEASURING PHYSICS RADIATION PYROMETRY SEMICONDUCTOR DEVICES TESTING
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Beschreibung
Zusammenfassung:	An oxygen sensor unit for detecting an oxygen concentration of a transfer chamber according to one embodiment of the present invention comprises: an oxygen sensor unit which is disposed on a valve line of the transfer chamber and which measures the oxygen concentration of the transfer chamber; a first coupling unit which is connected to the valve line and on which the oxygen sensor unit is mounted; and a second coupling unit which couples the first coupling unit to the valve line. The oxygen sensor unit measures the oxygen concentration of the transfer chamber to prevent generation of oxidized substances. 본 발명의 일 실시예에 따른 트랜스퍼 챔버의 산소농도 감지용 산소 센서 유닛은 트랜스퍼 챔버의 밸브 라인에 배치되어 트랜스퍼 챔버의 산소 농도를 측정하는 산소 센서부; 밸브 라인에 연결되며 산소 센서부가 장착되는 제1 결합부; 및 제1 결합부를 밸브 라인에 결합시키는 제2 결합부 포함한다.