Deposition Source
The present embodiment comprises: a heater assembly including a heater housing, which has a hollow body and a space in an upper part of a lower body, and a heater which is formed on an outer surface of the hollow body and has a part extended to a bottom surface of the lower body; a crucible containe...
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| creator | YONGHWAN LEE YOUNGSOO CHO SUNKEE KIM BYOUNGJUN MOON |
| description | The present embodiment comprises: a heater assembly including a heater housing, which has a hollow body and a space in an upper part of a lower body, and a heater which is formed on an outer surface of the hollow body and has a part extended to a bottom surface of the lower body; a crucible contained in the space; a terminal connected to the heater fat a lower side of the lower body; a first fastening member fixing the terminal; a second fastening member which is contained in the space and is fastened to the first fastening member; and an insulation cover which is contained in the space and wraps the second fastening member. In addition, the embodiment further comprises: a side reflector and an upper reflect top minimize nozzle clogging of the crucible and maximizes heater life. An evaporation source minimizes a space occupied by the heater assembly and protects the fastening members.
본 실시예는 로어 바디 상부에 중공 바디가 형성되고 공간이 형성된 히터 하우징과, 중공 바디의 외면에 형성되고 일부가 로어 바디 저면으로 연장된 히터를 포함하는 히터 어셈블리; 공간에 수용된 도가니; 로어 바디의 하측에서 히터에 접속된 단자; 단자를 고정시키는 제1체결부재; 공간에 수용되고 제1체결부재가 체결되는 제2체결부재; 및 공간에 수용되고 제2체결부재를 감싸는 절연 커버를 포함한다. 또한, 도가니의 노즐 클로깅을 최소화하고 히터 수명을 최대화하도록 사이드 리플렉터와 어퍼 리플렉터를 더 포함한다. |
| format | Patent |
| fullrecord | <record><control><sourceid>epo_EVB</sourceid><recordid>TN_cdi_epo_espacenet_KR20220057172A</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>KR20220057172A</sourcerecordid><originalsourceid>FETCH-epo_espacenet_KR20220057172A3</originalsourceid><addsrcrecordid>eNrjZBB0SS3IL84syczPUwjOLy1KTuVhYE1LzClO5YXS3AzKbq4hzh66QIXxqcUFicmpeakl8d5BRgZGRgYGpuaG5kaOxsSpAgBSZSB7</addsrcrecordid><sourcetype>Open Access Repository</sourcetype><iscdi>true</iscdi><recordtype>patent</recordtype></control><display><type>patent</type><title>Deposition Source</title><source>esp@cenet</source><creator>YONGHWAN LEE ; YOUNGSOO CHO ; SUNKEE KIM ; BYOUNGJUN MOON</creator><creatorcontrib>YONGHWAN LEE ; YOUNGSOO CHO ; SUNKEE KIM ; BYOUNGJUN MOON</creatorcontrib><description>The present embodiment comprises: a heater assembly including a heater housing, which has a hollow body and a space in an upper part of a lower body, and a heater which is formed on an outer surface of the hollow body and has a part extended to a bottom surface of the lower body; a crucible contained in the space; a terminal connected to the heater fat a lower side of the lower body; a first fastening member fixing the terminal; a second fastening member which is contained in the space and is fastened to the first fastening member; and an insulation cover which is contained in the space and wraps the second fastening member. In addition, the embodiment further comprises: a side reflector and an upper reflect top minimize nozzle clogging of the crucible and maximizes heater life. An evaporation source minimizes a space occupied by the heater assembly and protects the fastening members.
본 실시예는 로어 바디 상부에 중공 바디가 형성되고 공간이 형성된 히터 하우징과, 중공 바디의 외면에 형성되고 일부가 로어 바디 저면으로 연장된 히터를 포함하는 히터 어셈블리; 공간에 수용된 도가니; 로어 바디의 하측에서 히터에 접속된 단자; 단자를 고정시키는 제1체결부재; 공간에 수용되고 제1체결부재가 체결되는 제2체결부재; 및 공간에 수용되고 제2체결부재를 감싸는 절연 커버를 포함한다. 또한, 도가니의 노즐 클로깅을 최소화하고 히터 수명을 최대화하도록 사이드 리플렉터와 어퍼 리플렉터를 더 포함한다.</description><language>eng ; kor</language><subject>CHEMICAL SURFACE TREATMENT ; CHEMISTRY ; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL ; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL ; COATING MATERIAL WITH METALLIC MATERIAL ; COATING METALLIC MATERIAL ; DIFFUSION TREATMENT OF METALLIC MATERIAL ; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL ; METALLURGY ; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION</subject><creationdate>2022</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20220509&DB=EPODOC&CC=KR&NR=20220057172A$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,778,883,25551,76302</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20220509&DB=EPODOC&CC=KR&NR=20220057172A$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>YONGHWAN LEE</creatorcontrib><creatorcontrib>YOUNGSOO CHO</creatorcontrib><creatorcontrib>SUNKEE KIM</creatorcontrib><creatorcontrib>BYOUNGJUN MOON</creatorcontrib><title>Deposition Source</title><description>The present embodiment comprises: a heater assembly including a heater housing, which has a hollow body and a space in an upper part of a lower body, and a heater which is formed on an outer surface of the hollow body and has a part extended to a bottom surface of the lower body; a crucible contained in the space; a terminal connected to the heater fat a lower side of the lower body; a first fastening member fixing the terminal; a second fastening member which is contained in the space and is fastened to the first fastening member; and an insulation cover which is contained in the space and wraps the second fastening member. In addition, the embodiment further comprises: a side reflector and an upper reflect top minimize nozzle clogging of the crucible and maximizes heater life. An evaporation source minimizes a space occupied by the heater assembly and protects the fastening members.
본 실시예는 로어 바디 상부에 중공 바디가 형성되고 공간이 형성된 히터 하우징과, 중공 바디의 외면에 형성되고 일부가 로어 바디 저면으로 연장된 히터를 포함하는 히터 어셈블리; 공간에 수용된 도가니; 로어 바디의 하측에서 히터에 접속된 단자; 단자를 고정시키는 제1체결부재; 공간에 수용되고 제1체결부재가 체결되는 제2체결부재; 및 공간에 수용되고 제2체결부재를 감싸는 절연 커버를 포함한다. 또한, 도가니의 노즐 클로깅을 최소화하고 히터 수명을 최대화하도록 사이드 리플렉터와 어퍼 리플렉터를 더 포함한다.</description><subject>CHEMICAL SURFACE TREATMENT</subject><subject>CHEMISTRY</subject><subject>COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL</subject><subject>COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL</subject><subject>COATING MATERIAL WITH METALLIC MATERIAL</subject><subject>COATING METALLIC MATERIAL</subject><subject>DIFFUSION TREATMENT OF METALLIC MATERIAL</subject><subject>INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL</subject><subject>METALLURGY</subject><subject>SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2022</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNrjZBB0SS3IL84syczPUwjOLy1KTuVhYE1LzClO5YXS3AzKbq4hzh66QIXxqcUFicmpeakl8d5BRgZGRgYGpuaG5kaOxsSpAgBSZSB7</recordid><startdate>20220509</startdate><enddate>20220509</enddate><creator>YONGHWAN LEE</creator><creator>YOUNGSOO CHO</creator><creator>SUNKEE KIM</creator><creator>BYOUNGJUN MOON</creator><scope>EVB</scope></search><sort><creationdate>20220509</creationdate><title>Deposition Source</title><author>YONGHWAN LEE ; YOUNGSOO CHO ; SUNKEE KIM ; BYOUNGJUN MOON</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_KR20220057172A3</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>eng ; kor</language><creationdate>2022</creationdate><topic>CHEMICAL SURFACE TREATMENT</topic><topic>CHEMISTRY</topic><topic>COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL</topic><topic>COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL</topic><topic>COATING MATERIAL WITH METALLIC MATERIAL</topic><topic>COATING METALLIC MATERIAL</topic><topic>DIFFUSION TREATMENT OF METALLIC MATERIAL</topic><topic>INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL</topic><topic>METALLURGY</topic><topic>SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION</topic><toplevel>online_resources</toplevel><creatorcontrib>YONGHWAN LEE</creatorcontrib><creatorcontrib>YOUNGSOO CHO</creatorcontrib><creatorcontrib>SUNKEE KIM</creatorcontrib><creatorcontrib>BYOUNGJUN MOON</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>YONGHWAN LEE</au><au>YOUNGSOO CHO</au><au>SUNKEE KIM</au><au>BYOUNGJUN MOON</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>Deposition Source</title><date>2022-05-09</date><risdate>2022</risdate><abstract>The present embodiment comprises: a heater assembly including a heater housing, which has a hollow body and a space in an upper part of a lower body, and a heater which is formed on an outer surface of the hollow body and has a part extended to a bottom surface of the lower body; a crucible contained in the space; a terminal connected to the heater fat a lower side of the lower body; a first fastening member fixing the terminal; a second fastening member which is contained in the space and is fastened to the first fastening member; and an insulation cover which is contained in the space and wraps the second fastening member. In addition, the embodiment further comprises: a side reflector and an upper reflect top minimize nozzle clogging of the crucible and maximizes heater life. An evaporation source minimizes a space occupied by the heater assembly and protects the fastening members.
본 실시예는 로어 바디 상부에 중공 바디가 형성되고 공간이 형성된 히터 하우징과, 중공 바디의 외면에 형성되고 일부가 로어 바디 저면으로 연장된 히터를 포함하는 히터 어셈블리; 공간에 수용된 도가니; 로어 바디의 하측에서 히터에 접속된 단자; 단자를 고정시키는 제1체결부재; 공간에 수용되고 제1체결부재가 체결되는 제2체결부재; 및 공간에 수용되고 제2체결부재를 감싸는 절연 커버를 포함한다. 또한, 도가니의 노즐 클로깅을 최소화하고 히터 수명을 최대화하도록 사이드 리플렉터와 어퍼 리플렉터를 더 포함한다.</abstract><oa>free_for_read</oa></addata></record> |
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| subjects | CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION |
| title | Deposition Source |
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