재료 제거 작업을 수행하기 위한 유체 조성물 및 방법

기판의 화학적 기계적 연마에 적합한 유체 조성물은 다가 금속 붕산염, 적어도 하나의 산화제, 및 용매를 포함할 수 있다. 유체 조성물에는 연마 입자가 본질적으로 없을 수 있고 높은 재료 제거율 및 우수한 표면 마감을 달성할 수 있다. A fluid composition suitable for chemical mechanical polishing a substrate can in include a multi-valent metal borate, at least one oxidizer, and a solvent. The fluid co...

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Bibliographische Detailangaben
Hauptverfasser:	BUI LONG HUY, WARD DOUGLAS E, FU LIN, SHERLOCK JASON A
Format:	Patent
Sprache:	kor
Schlagworte:	ADHESIVES BASIC ELECTRIC ELEMENTS CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL COMPOUNDS THEREOF DIFFUSION TREATMENT OF METALLIC MATERIAL DRESSING OR CONDITIONING OF ABRADING SURFACES DYES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS GRINDING INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL INORGANIC CHEMISTRY MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING METALLURGY MISCELLANEOUS APPLICATIONS OF MATERIALS MISCELLANEOUS COMPOSITIONS MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLICMATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASSC23 AND AT LEAST ONEPROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25 NATURAL RESINS NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE NON-METALLIC ELEMENTS PAINTS PERFORMING OPERATIONS POLISHES POLISHING POLISHING COMPOSITIONS OTHER THAN FRENCH POLISH SEMICONDUCTOR DEVICES SKI WAXES TRANSPORTING
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Beschreibung
Zusammenfassung:	기판의 화학적 기계적 연마에 적합한 유체 조성물은 다가 금속 붕산염, 적어도 하나의 산화제, 및 용매를 포함할 수 있다. 유체 조성물에는 연마 입자가 본질적으로 없을 수 있고 높은 재료 제거율 및 우수한 표면 마감을 달성할 수 있다. A fluid composition suitable for chemical mechanical polishing a substrate can in include a multi-valent metal borate, at least one oxidizer, and a solvent. The fluid composition can be essentially free of abrasive particles and may achieve a high material removal rate and excellent surface finish.