Wafer pre heating apparatus

The present invention relates to a device for preheating a substrate such as a wafer to be inputted into a process chamber in a semiconductor manufacturing process before input. The present invention embodies a novel type of substrate-preheating method of installing an upper heating type heater in a...

Ausführliche Beschreibung

Bibliographische Detailangaben

1. Verfasser:	CHOI, HWAN HYUN
Format:	Patent
Sprache:	eng ; kor
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC HEATING ELECTRIC LIGHTING NOT OTHERWISE PROVIDED FOR ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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