IGZO RECOVERING METHOD FOR ZINC INDIUM AND GALLIUM FROM IGZO WASTE TARGET
Provided is a method of collecting zinc, indium and gallium from an IGZO waste target. The method includes the following steps of: grinding a waste target composed of indium, gallium and zinc oxides to generate a ground material; adding a catalyst to the ground material to generate a mixture; heatin...
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Format: | Patent |
Sprache: | eng ; kor |
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