APPARATUS FOR TRANSFERING SUBSTRATE AND METHOD FOR CONTROLLING THEREOF

The present invention relates to a substrate transfer device for transferring a substrate and a control method thereof. The substrate transfer device of the present invention comprises: a movable rail unit; a vacuum table formed to be movable on the movable rail unit, and having a plurality of holes...

Ausführliche Beschreibung

Gespeichert in:

Bibliographische Detailangaben
Hauptverfasser:	LEE JAEWOONG, KIM TAEWON, LEE HYOUNJOO, KANG SEOKJIN
Format:	Patent
Sprache:	eng ; kor
Schlagworte:	BASIC ELECTRIC ELEMENTS CONVEYING ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY HANDLING THIN OR FILAMENTARY MATERIAL PACKING PERFORMING OPERATIONS PNEUMATIC TUBE CONVEYORS SEMICONDUCTOR DEVICES SHOP CONVEYOR SYSTEMS STORING TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING ORTIPPING TRANSPORTING
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!

Beschreibung
Zusammenfassung:	The present invention relates to a substrate transfer device for transferring a substrate and a control method thereof. The substrate transfer device of the present invention comprises: a movable rail unit; a vacuum table formed to be movable on the movable rail unit, and having a plurality of holes on an upper part; a vacuum holding unit provided on the vacuum table, and adsorbing a substrate disposed on the vacuum table by vacuum; and a supply module disposed at a lower part of the movable rail unit, formed to be lifted and lowered, and formed to be detachable from the vacuum holding unit. The supply module is coupled to the vacuum holding unit by being lifted to supply electricity and air to the vacuum holding unit when the vacuum table is temporarily stopped. Therefore, a distance that the vacuum table is moved can increase. 본 발명은, 기판을 이송시키는 기판 이송 장치 및 이의 제어 방법에 대한 것으로, 이동 레일부, 상기 이동 레일부 위를 이동 가능하게 형성되고, 상부에 복수의 홀을 구비하는 진공 테이블, 상기 진공 테이블에 구비되고, 상기 진공 테이블 상에 배치되는 기판을 진공 흡착 가능하게 구비되는 진공유지부, 상기 이동 레일부의 하부에 배치되고, 상승 및 하강 가능하게 형성되며, 상기 진공유지부와 착탈 가능하게 형성되는 공급 모듈, 상기 공급 모듈은, 상기 진공 테이블이 일시 정지되는 경우 상승하여 상기 진공유지부와 결합하고, 상기 진공유지부에 전기 및 에어를 공급가능하게 형성된다.