Linear Deposition Source

A linear evaporator comprises: a crucible which has a deposition space in which a deposition material is accommodated and is long in a transverse direction; a heater which heats the crucible around the outside of the crucible; a crucible cap which covers the deposition space and provides a plurality...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	HUNHO HONG, YOUNGSHIN PARK, YOUNGSOO CHO, BYOUNGJUN MOON
Format:	Patent
Sprache:	eng ; kor
Schlagworte:	CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
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