Linear Deposition Source
A linear evaporator comprises: a crucible which has a deposition space in which a deposition material is accommodated and is long in a transverse direction; a heater which heats the crucible around the outside of the crucible; a crucible cap which covers the deposition space and provides a plurality...
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Format: | Patent |
Sprache: | eng ; kor |
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Zusammenfassung: | A linear evaporator comprises: a crucible which has a deposition space in which a deposition material is accommodated and is long in a transverse direction; a heater which heats the crucible around the outside of the crucible; a crucible cap which covers the deposition space and provides a plurality of nozzles with a gap therebetween; and a plurality of inner plates which are located apart from a lower side of the crucible cap. A lowest inner plate of the plurality of inner plates comprises: at least one first hole which is closer to one wall than the other wall in a longitudinal direction of the crucible, and at least one second hole which is closer to the other wall than the one wall. The linear evaporator minimizes deformation of the deposition material.
선형 증발원은 증착 물질이 수용되는 증착 공간이 형성되고 좌우 방향으로 긴 도가니; 도가니의 외측 주변에서 도가니를 가열하는 히터; 증착 공간을 덮고 복수개 노즐이 이격되게 제공된 도가니 캡; 및 도가니 캡 하측에 이격되게 위치되는 복수개 이너 플레이트를 포함하고, 복수개 이너 플레이트 중 최하측 이너 플레이트는 도가니의 길이 방향으로 일측벽와 타측벽 중 일측벽에 더 근접한 적어도 하나의 제1홀과, 일측벽과 타측벽 중 타측벽에 더 근접한 적어도 하나의 제2홀을 포함한다. |
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