METHOD FOR WET TEXTURING OF SOLAR CELL SUBSTRATE

The present invention relates to a method for wet texturing of a solar cell substrate, a method of forming a texture on a surface of a silicon wafer fabricated by diamond wire sawing (DWS), comprises: a first step of cleaning a surface of the silicon wafer on which a phase change layer containing a...

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Bibliographische Detailangaben
Hauptverfasser: KIM DONG HWAN, LEE HAESEOK, KANG YOON MOOK, JUNG YUJIN, BAE SOOHYUN
Format: Patent
Sprache:eng ; kor
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Beschreibung
Zusammenfassung:The present invention relates to a method for wet texturing of a solar cell substrate, a method of forming a texture on a surface of a silicon wafer fabricated by diamond wire sawing (DWS), comprises: a first step of cleaning a surface of the silicon wafer on which a phase change layer containing a metastable silicon phase is formed; a second step of heat-treating the cleaned silicon wafer to form a mixed layer including a phase change layer region and a crystalline layer region on the surface of the wafer; a third step of washing the surface of the silicon wafer on which the mixed layer is formed using a wet cleaning solution; and a fourth step of etching the surface of the wafer by immersing the washed silicon wafer in an acid solution, to form a text on the surface of the wafer. 본 발명은 태양전지 기판의 습식 텍스쳐링 방법에 관한 것으로, DWS 방식으로 제작된 실리콘 웨이퍼의 표면에 텍스쳐를 형성하는 방법에 있어서, 준안정 실리콘 상을 포함하는 상변환층이 형성된 실리콘 웨이퍼의 표면을 세정하는 제 1 단계; 세정된 실리콘 웨이퍼를 열처리하여 웨이퍼 표면에 상변환층 영역과 결정질층 영역을 포함하는 혼재층을 형성하는 제 2 단계; 습식 세정 용액을 통해 혼재층이 형성된 실리콘 웨이퍼의 표면을 세척하는 제 3 단계; 및 세척된 실리콘 웨이퍼를 산 용액에 침지시켜 웨이퍼 표면에 텍스쳐가 형성되도록 식각하는 제 4 단계를 포함한다.