LASER DEVICES INCLUDING BEAM POSITION CALIBRATOR AND METHOD FOR IRRADIATING LASER BY USING THE SAME

According to an embodiment of the present invention, a laser device may comprise: a laser source which provides a laser beam to an object to be processed; a laser deflection unit for deflecting the laser beam supplied from the laser source; an objective lens for focusing the scattered light of the l...

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Bibliographische Detailangaben
Hauptverfasser:	YOU JUNGHWA, ALEXANDER VORONOV, JUNG WOOHYUN, HAN GYOOWAN
Format:	Patent
Sprache:	eng ; kor
Schlagworte:	CLADDING OR PLATING BY SOLDERING OR WELDING CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR PERFORMING OPERATIONS SOLDERING OR UNSOLDERING TRANSPORTING WELDING WORKING BY LASER BEAM
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Beschreibung
Zusammenfassung:	According to an embodiment of the present invention, a laser device may comprise: a laser source which provides a laser beam to an object to be processed; a laser deflection unit for deflecting the laser beam supplied from the laser source; an objective lens for focusing the scattered light of the laser beam that is incident on the object and is scattered; an image capture device for capturing an image of the scattered light focused by the objective lens; and a correction unit for correcting the position of the laser beam by using the captured image. 실시예에 따른 레이저 장치는 공정 대상물에 레이저 빔을 제공하는 레이저 소스, 상기 레이저 소스로부터 공급되는 상기 레이저 빔을 편항하는 레이저 편향부, 상기 공정 대상물에 입사되어 산란된 상기 레이저 빔의 산란광을 포커싱하는 대물 렌즈, 상기 대물 렌즈에서 포커싱된 상기 산란 광의 이미지를 캡쳐하는 이미지 캡쳐 장치, 그리고 상기 캡쳐된 이미지를 이용하여, 상기 레이저 빔의 위치를 보정하는 보정부를 포함할 수 있다.