Susceptor Substrate Support Member Apparatus for Processing Substrate Including Susceptor and Substrate Support Member Method of Manufacturing Susceptor and Method of Manufacturing Substrate Support Member

The present invention relates to a susceptor, a substrate support part, a substrate processing apparatus including the susceptor and the substrate support part, a method of manufacturing the susceptor, and a method of manufacturing the substrate support part. The susceptor includes: a base for suppo...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	SU YOUNG KWON, PARK SANG HWA
Format:	Patent
Sprache:	eng ; kor
Schlagworte:	BASIC ELECTRIC ELEMENTS CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY SEMICONDUCTOR DEVICES SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
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