APC APC AIR PRESSURE CONTROL DEVICE AND AIR PRESSURE CONTROL METHOD

According to an example of the present invention, an APC control device is disclosed. According to one example, a processing device comprises: a processing chamber; an APC valve including a plate for regulating pressure inside the processing chamber and first and second step motors for regulating a...

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Bibliographische Detailangaben
Hauptverfasser:	JEON SUNG YOUN, JANG YONG SEOK, PARK IN KYU, LEE CHUNG WOO
Format:	Patent
Sprache:	eng ; kor
Schlagworte:	BLASTING CONTROL OR REGULATION OF ELECTRIC MOTORS, ELECTRIC GENERATORSOR DYNAMO-ELECTRIC CONVERTERS CONTROLLING TRANSFORMERS, REACTORS OR CHOKE COILS CONVERSION OR DISTRIBUTION OF ELECTRIC POWER ELECTRICITY GENERATION HEATING LIGHTING MECHANICAL ENGINEERING POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS PUMPS FOR LIQUIDS OR ELASTIC FLUIDS WEAPONS
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Beschreibung
Zusammenfassung:	According to an example of the present invention, an APC control device is disclosed. According to one example, a processing device comprises: a processing chamber; an APC valve including a plate for regulating pressure inside the processing chamber and first and second step motors for regulating a height of the plate; and an APC controller for controlling the APC valve. The APC controller comprises: a first controller for controlling positions of the first step motor and the second step motor; and a second controller for compensating for a difference in the positions between the first step motor and the second step motor. 본 발명의 일 예시에 따른 APC 제어 장치가 개시된다. 일 예시에 따르면, 상기 처리 장치는 프로세싱 챔버; 상기 프로세싱 챔버 내부의 압력을 조절하기 위한 플레이트, 그리고 상기 플레이트의 높이를 조절하는 제1 스텝 모터 및 제2 스텝 모터를 포함하는 APC 밸브; 및 상기 APC 밸브를 제어하는 APC 컨트롤러를 포함하되, 상기 APC 컨트롤러는, 상기 제1 스텝 모터 및 상기 제2 스텝 모터의 위치를 제어하는 제1 제어기; 및 상기 제1 스텝 모터와 상기 제2 스텝 모터의 위치의 차이를 보상하는 제2 제어기;를 포함할 수 있다.