HEAD CLEANING UNIT AND APPARATUS FOR TREATING SUBSTRATE INCLUDING THE SAME

The present invention provides an inkjet head cleaning unit capable of thoroughly removing fine liquid crystal remaining in a head, and a substrate processing device comprising the same. The inkjet head cleaning unit comprises: a body; a spray unit formed on the body and spraying a cleaning fluid to...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: YOU JAE HYUN, LIM HUN SUB
Format: Patent
Sprache:eng ; kor
Schlagworte:
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