MEMBRANE DESIGN FOR REDUCING DEFECTS IN ELECTROPLATING SYSTEMS

Certain embodiments disclosed in the present application relates to an apparatus and methods for performing electrodeposition of a material on a substrate. More specifically, the present invention provides a new membrane for separating a cathode and a substrate from an anode and a method of using th...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	KIM DOYEON, HUANG LUDAN, TAKADA YUICHI, MAJID TARIQ, GHONGADI SHANTINATH
Format:	Patent
Sprache:	eng ; kor
Schlagworte:	APPARATUS THEREFOR BASIC ELECTRIC ELEMENTS CHEMISTRY ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY ELECTROFORMING ELECTROLYTIC OR ELECTROPHORETIC PROCESSES ELECTROLYTIC OR ELECTROPHORETIC PROCESSES FOR THE PRODUCTIONOF COMPOUNDS OR NON-METALS METALLURGY PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTIONOF COATINGS SEMICONDUCTOR DEVICES
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