MEMBRANE DESIGN FOR REDUCING DEFECTS IN ELECTROPLATING SYSTEMS

Certain embodiments disclosed in the present application relates to an apparatus and methods for performing electrodeposition of a material on a substrate. More specifically, the present invention provides a new membrane for separating a cathode and a substrate from an anode and a method of using th...

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Bibliographische Detailangaben
Hauptverfasser:	KIM DOYEON, HUANG LUDAN, TAKADA YUICHI, MAJID TARIQ, GHONGADI SHANTINATH
Format:	Patent
Sprache:	eng ; kor
Schlagworte:	APPARATUS THEREFOR BASIC ELECTRIC ELEMENTS CHEMISTRY ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY ELECTROFORMING ELECTROLYTIC OR ELECTROPHORETIC PROCESSES ELECTROLYTIC OR ELECTROPHORETIC PROCESSES FOR THE PRODUCTIONOF COMPOUNDS OR NON-METALS METALLURGY PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTIONOF COATINGS SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:	Certain embodiments disclosed in the present application relates to an apparatus and methods for performing electrodeposition of a material on a substrate. More specifically, the present invention provides a new membrane for separating a cathode and a substrate from an anode and a method of using the membrane. The membrane comprises at least ion exchange layer and a charge separation layer. Disclosed embodiments are advantageous to maintain relatively constant concentrations of species in electrolyte as time goes during resting (non-plating) period. 본 명세서에서 개시된 특정 실시예들은 기판 상에 재료를 전기디포지션하는 장치 및 방법들에 관한 것이다. 보다 구체적으로, 애노드로부터 캐소드/기판을 분리하기 위한 신규한 멤브레인, 및 이러한 멤브레인을 사용하는 방법이 제공된다. 멤브레인은 적어도 이온 교환 층 및 전하 분리 층을 포함한다. 개시된 실시예들은 특히 휴지 (즉, 비도금) 기간 동안에 시간이 지남에 따라서 전해질 내에서 종들의 상대적으로 일정한 농도들을 유지하는데 유리하다.