Multiple overlapped Heater for evaporator

The present invention is to provide a heater for an evaporation source with higher heating efficiency. In accordance with the above object, the present invention arranges heating wires on the outer wall of a crucible so as to be wound one time by reciprocating in the vertical direction, and again, a...

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Bibliographische Detailangaben
Hauptverfasser:	SEO HYUN, JEONG YONG WON, CHOI, MYUNG WOON, PARK EUN SIK, YOUN YUNGSIK, NA YOUNGHYUCK
Format:	Patent
Sprache:	eng ; kor
Schlagworte:	CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
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Beschreibung
Zusammenfassung:	The present invention is to provide a heater for an evaporation source with higher heating efficiency. In accordance with the above object, the present invention arranges heating wires on the outer wall of a crucible so as to be wound one time by reciprocating in the vertical direction, and again, arranges a heating wire in an overlapping manner so as to be positioned in a gap between the heating wires. 본 발명의 목적은 좀 더 가열 효율을 높인 증착원용 히터를 제공하고자 하는 것이다. 상기 목적에 따라 본 발명은 도가니 외벽에 열선을 수직방향으로 왕복하며 1회 감듯이 배열 하고, 다시 열선 사이 간격에 열선이 오도록 중첩적으로 배열한 다중 히터를 제공한다.