Ceramic parts with improved dielectric constant and manufacturing method thereof

The present invention relates to ceramic powder and a ceramic part, which have an improved dielectric constant, and a manufacturing method thereof. More specifically, the present invention relates to a method for manufacturing a ceramic part for a semiconductor etching device. The method comprises:...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	BAE JONG SIK, BAE KIE HWA
Format:	Patent
Sprache:	eng ; kor
Schlagworte:	ARTIFICIAL STONE BASIC ELECTRIC ELEMENTS CEMENTS CERAMICS CHEMISTRY COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDINGMATERIALS CONCRETE ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY LIME, MAGNESIA METALLURGY REFRACTORIES SEMICONDUCTOR DEVICES SLAG TREATMENT OF NATURAL STONE
Online-Zugang:	Volltext bestellen
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