A Method for Preventing a Back Flow to Protect a Wafer and an Apparatus for the Same

The present invention relates to a backflow prevention method for semiconductor wafer protection, and to a device therefor. The backflow prevention method for semiconductor wafer protection includes the steps of: receiving, by a controller, an alarm signal generated from a vacuum pump installed in a...

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Bibliographische Detailangaben
1. Verfasser:	LEE HA KYUN
Format:	Patent
Sprache:	eng ; kor
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
Online-Zugang:	Volltext bestellen
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