A Method for Preventing a Back Flow to Protect a Wafer and an Apparatus for the Same
The present invention relates to a backflow prevention method for semiconductor wafer protection, and to a device therefor. The backflow prevention method for semiconductor wafer protection includes the steps of: receiving, by a controller, an alarm signal generated from a vacuum pump installed in a...
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| Format: | Patent |
| Sprache: | eng ; kor |
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| Zusammenfassung: | The present invention relates to a backflow prevention method for semiconductor wafer protection, and to a device therefor. The backflow prevention method for semiconductor wafer protection includes the steps of: receiving, by a controller, an alarm signal generated from a vacuum pump installed in an exhaust line of a process chamber; and adjusting a gate valve and an isolation valve installed in the exhaust line according to the reception of the alarm signal.
본 발명은 반도체 웨이퍼 보호를 위한 역류 방지 방법 및 이를 위한 장치에 관한 것이다. 반도체 웨이퍼 보호을 위한 역류 방지 방법은 공정 챔버의 배기 라인에 설치된 진공 펌프로부터 발생된 경보 신호가 컨트롤러에 의하여 수신되는 단계; 및 경보 신호의 수신에 따라 배기 라인에 설치된 게이트 밸브 및 격리 밸브가 조절되는 단계를 포함한다. |
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