INTEGRATED CIRCUIT DEVICE AND SEMICONDUCTOR PACKAGE INCLUDING THE SAME
An object of the present invention is to provide an integrated circuit device comprising a through-silicon-via (TSV) structure and a semiconductor package comprising the same. The technical idea of the present invention comprises: a semiconductor substrate; a first TSV structures passing through a f...
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Zusammenfassung: | An object of the present invention is to provide an integrated circuit device comprising a through-silicon-via (TSV) structure and a semiconductor package comprising the same. The technical idea of the present invention comprises: a semiconductor substrate; a first TSV structures passing through a first region of the semiconductor substrate and spaced apart from each other at a first pitch; a first discrete element disposed between the first TSV structures and spaced apart from the first TSV structures by a distance greater than a first keep-off distance; and second TSV structures passing through a second region of the semiconductor substrate and spaced apart from each other by a second pitch smaller than the first pitch. An integrated circuit device in which an individual device of the same type as a first individual device is not disposed between the second TSV structures is provided.
본 개시의 기술적 사상은 반도체 기판; 상기 반도체 기판의 제1 영역을 관통하고, 제1 피치로 상호 이격된 제1 TSV(through-silicon-via) 구조들; 상기 제1 TSV 구조들 사이에 배치되고, 상기 제1 TSV 구조들로부터 제1 킵-오프 거리보다 큰 거리로 이격된 제1 개별 소자; 및 상기 반도체 기판의 제2 영역을 관통하고, 상기 제1 피치보다 작은 제2 피치로 이격된 제2 TSV 구조들;을 포함하고, 상기 제2 TSV 구조들 사이에는 상기 제1 개별 소자와 동종의 개별 소자가 배치되지 않는 집적회로 소자를 제공한다. |
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