Resin printing apparatus

According to an embodiment of the present invention, a resin coating device comprises: a base; a rotary stage disposed on an upper side of the base; a nozzle spaced from a substrate loaded on an upper surface of the rotary stage, disposed in a diagonal direction with respect to a side surface of a h...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: HONGKEUN KIM, CHANGYONG PARK, HYUNGJIN LEE, HYUNSEUNG CHOI, SUNGHWAN BANG
Format: Patent
Sprache:eng ; kor
Schlagworte:
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Beschreibung
Zusammenfassung:According to an embodiment of the present invention, a resin coating device comprises: a base; a rotary stage disposed on an upper side of the base; a nozzle spaced from a substrate loaded on an upper surface of the rotary stage, disposed in a diagonal direction with respect to a side surface of a hole formed in the substrate, and applying a resin; and high direct current power connected to the nozzle and the substrate to form an electric field between the nozzle and the substrate. 본 실시 예의 레진 코팅 장치는 베이스; 베이스 상측에 배치된 회전 스테이지; 회전 스테이지의 상면에 로딩된 서브스트레이트와 이격되고 서브스트레이트에 형성된 홀의 측면에 대해 사선방향으로 배치되며 레진을 노포하는 노즐; 및 노즐과 서브스트레이트에 연결되어 노즐과 서브스트레이트 사이에 전기작을 형성하는 고직류파워을 포함한다.