ELECTROSTATIC CHUCK TILED ELECTROSTATIC CHUCK COMPRISING THE SAME AND METHOD OF MANUFACTURING ELECTROSTATIC CHUCK

The electrostatic chuck of the present invention includes: a first insulating layer including an upper surface and a side surface; a first electrode pattern and a second electrode pattern respectively disposed on the upper surface and the side surface of the first insulating layer; and a second insu...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	KIM JONGHYUP, NA HEUNGYEOL, OH WONHEE, JO CHEOLRAE, KIM YONGHYUN
Format:	Patent
Sprache:	eng ; kor
Schlagworte:	BASIC ELECTRIC ELEMENTS COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOTDIRECTED TO A PARTICULAR RESULT CONVERSION OR DISTRIBUTION OF ELECTRIC POWER DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g.ARRANGEMENTS FOR COPYING OR CONTROLLING ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY GENERATION MACHINE TOOLS MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OFPARTICULAR DETAILS OR COMPONENTS METAL-WORKING NOT OTHERWISE PROVIDED FOR PERFORMING OPERATIONS SEMICONDUCTOR DEVICES TRANSPORTING
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Beschreibung
Zusammenfassung:	The electrostatic chuck of the present invention includes: a first insulating layer including an upper surface and a side surface; a first electrode pattern and a second electrode pattern respectively disposed on the upper surface and the side surface of the first insulating layer; and a second insulating layer disposed on the first insulating layer to cover the first electrode pattern. The first electrode pattern and the second electrode pattern are electrically connected to each other. Accordingly, the present invention can improve the reliability and efficiency of products and processes. 본 발명의 정전 척은 상면 및 측면을 포함하는 제1 절연층, 상기 제1 절연층의 상기 상면 및 상기 측면에 각각 배치된 제1 전극 패턴 및 제2 전극 패턴 및 상기 제1 절연층 상에 배치되어 상기 제1 전극 패턴을 커버하는 제2 절연층을 포함하고, 상기 제1 전극 패턴 및 상기 제2 전극 패턴은 서로 전기적으로 연결된다. 따라서, 본 발명은 제품 및 공정의 신뢰도 및 효율성을 향상시킬 수 있다.