DEPOSITION DEVICE

According to one embodiment of the present invention, the deposition apparatus comprises: a housing; a nozzle which is placed on the housing and has a first nozzle hole and a second nozzle hole adjacent to the first nozzle hole; a crucible which is placed on the housing and has a first crucible cont...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: PARK SUNGJONG, KANG HYUNGYU, HAN JONGBUN, SEO DONGKIUN, HAN SANGJIN
Format: Patent
Sprache:eng ; kor
Schlagworte:
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