DEPOSITION DEVICE

According to one embodiment of the present invention, the deposition apparatus comprises: a housing; a nozzle which is placed on the housing and has a first nozzle hole and a second nozzle hole adjacent to the first nozzle hole; a crucible which is placed on the housing and has a first crucible cont...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: PARK SUNGJONG, KANG HYUNGYU, HAN JONGBUN, SEO DONGKIUN, HAN SANGJIN
Format: Patent
Sprache:eng ; kor
Schlagworte:
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Beschreibung
Zusammenfassung:According to one embodiment of the present invention, the deposition apparatus comprises: a housing; a nozzle which is placed on the housing and has a first nozzle hole and a second nozzle hole adjacent to the first nozzle hole; a crucible which is placed on the housing and has a first crucible containing a first deposition material and a second crucible containing a second deposition material; and a connection unit which has a first tube placed between the first nozzle hole and the first crucible, and a second tube placed between the second nozzle hole and the second crucible. The deposition apparatus can regularly deposit different deposition materials on a target substrate. 본 발명의 일 실시 예에 따르면, 증착 장치는, 하우징, 상기 하우징 상에 배치되고, 제1 노즐홀과 상기 제1 노즐홀에 인접한 제2 노즐홀이 정의된 노즐, 상기 하우징 내부에 배치되고, 제1 증착 물질을 수용하는 제1 도가니 및 제2 증착 물질을 수용하는 제2 도가니를 구비하는 도가니, 및 상기 제1 노즐홀과 상기 제1 도가니 사이에 배치된 제1 튜브 및 상기 제2 노즐홀과 상기 제2 도가니 사이에 배치된 제2 튜브를 구비하는 연결부를 포함한다.