Semiconductor device and method of fabricating the same

Provided are a semiconductor device and a manufacturing method thereof. The semiconductor device includes: a plurality of conductive pillars disposed on a semiconductor substrate; a first support pattern partially in contact with one side of the conductive pillars, connecting the conductive pillars,...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: WOO CHANG SU, KIM YOUNSOO, SONG JEONG GYU, MOON SUNMIN, KIM HAERYONG, JUNG KYOOHO
Format: Patent
Sprache:eng ; kor
Schlagworte:
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