METHOD OF PROCESSING A SUBSTRATE AND APPARATUS FOR PERFORMING THE SAME

According to a substrate processing method, during a process of processing a substrate by using a plate, vibration of the substrate placed on a lift pin for elevating the substrate with respect to the plate can be measured in real time. Information on vibration of the substrate can be transmitted to...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	HWANG YOUNG HO, HEO SEOK, EOM JAE YOUNG, PARK SUNG YONG, SEO EUN SEOK
Format:	Patent
Sprache:	eng ; kor
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
Online-Zugang:	Volltext bestellen
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