IMAGE SENSOR AND METHOD FOR FABRICATING THE SAME

An image sensor with improved product reliability and quality and a manufacturing method thereof are provided. The image sensor includes: a substrate including a plurality of unit pixels, each of which includes a photoelectric conversion layer; a pixel separation pattern formed in a grid shape in th...

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Bibliographische Detailangaben
Hauptverfasser:	KIM SUNG IN, KIM CHANG HWA, LIM KANG MOOK, CHOI YEO SEON
Format:	Patent
Sprache:	eng ; kor
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
Online-Zugang:	Volltext bestellen
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Beschreibung
Zusammenfassung:	An image sensor with improved product reliability and quality and a manufacturing method thereof are provided. The image sensor includes: a substrate including a plurality of unit pixels, each of which includes a photoelectric conversion layer; a pixel separation pattern formed in a grid shape in the substrate to separate the plurality of unit pixels; and a support structure disposed to correspond to the lattice points of the pixel separation pattern and supporting adjacent unit pixels in the substrate. 제품 신뢰성 및 품질이 향상된 이미지 센서 및 그 제조 방법이 제공된다. 이미지 센서는, 광전 변환층을 각각 포함하는 복수의 단위 픽셀들을 포함하는 기판, 기판 내에, 격자형으로 형성되어 복수의 단위 픽셀들을 분리하는 픽셀 분리 패턴, 및 기판 내에, 픽셀 분리 패턴의 격자점에 대응되도록 배치되어, 인접하는 단위 픽셀들을 지지하는 지지 구조체를 포함한다.