산화물 소결체, 스퍼터링 타깃 및 스퍼터링 타깃의 제조 방법

산화물 소결체 (1) 로서, 산화물 소결체 (1) 의 표면의 비커스 경도의 평균값이, 500 Hv 를 초과하고, 900 Hv 미만인, 산화물 소결체 (1). An oxide sintered body (1) in which the average value of the Vickers Hardness values of the surface of the oxide sintered body (1) is 500 to 900 Hv exclusive....

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Bibliographische Detailangaben
1. Verfasser:	KAIJO AKIRA
Format:	Patent
Sprache:	kor
Schlagworte:	ARTIFICIAL STONE CEMENTS CERAMICS CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDINGMATERIALS CONCRETE DIFFUSION TREATMENT OF METALLIC MATERIAL INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL LIME, MAGNESIA METALLURGY REFRACTORIES SLAG SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION TREATMENT OF NATURAL STONE
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Zusammenfassung:	산화물 소결체 (1) 로서, 산화물 소결체 (1) 의 표면의 비커스 경도의 평균값이, 500 Hv 를 초과하고, 900 Hv 미만인, 산화물 소결체 (1). An oxide sintered body (1) in which the average value of the Vickers Hardness values of the surface of the oxide sintered body (1) is 500 to 900 Hv exclusive.