SUBSTRATE PROCESSING DEVICE

The present invention relates to a substrate processing device. The substrate processing device includes: a base unit; a driving unit mounted on the base unit and driven when power is applied; a rotating unit rotated by the driving unit; a support unit which is interlocked with the rotating unit and...

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Bibliographische Detailangaben
Hauptverfasser:	HAN HEUNG SOO, PARK JIHO
Format:	Patent
Sprache:	eng ; kor
Schlagworte:	BASIC ELECTRIC ELEMENTS CLEANING CLEANING IN GENERAL ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY PERFORMING OPERATIONS PREVENTION OF FOULING IN GENERAL SEMICONDUCTOR DEVICES TRANSPORTING
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