FILM THICKNESS MEASURING SYSTEM AND FILM THICKNESS MEASURING METHOD

The present invention provides a system for measuring the thickness of a film, which comprises: a holding unit for holding a substrate; a photographing unit for photographing the surface of the substrate held by the holding unit to obtain image data; and a control unit. The control unit receives spe...

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Bibliographische Detailangaben
1. Verfasser:	UMEHARA YASUTOSHI
Format:	Patent
Sprache:	eng ; kor
Schlagworte:	BASIC ELECTRIC ELEMENTS CALCULATING COMPUTING COUNTING ELECTRIC COMMUNICATION TECHNIQUE ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY IMAGE DATA PROCESSING OR GENERATION, IN GENERAL MEASURING MEASURING ANGLES MEASURING AREAS MEASURING IRREGULARITIES OF SURFACES OR CONTOURS MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS PHYSICS PICTORIAL COMMUNICATION, e.g. TELEVISION SEMICONDUCTOR DEVICES TESTING
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