DETERMINING LOCATIONS OF SUSPECTED DEFECTS

기판의 의심되는 결함들의 위치들을 결정하기 위한 방법, 비-일시적 컴퓨터 판독가능한 매체, 및 검출 시스템이 개시된다. A method, a non-transitory computer readable medium and a detection system for determining locations of suspected defects of a substrate.

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Bibliographische Detailangaben
Hauptverfasser:	BEN SHLOMO TAL, GREENBERG OFIR, YOUN DAE HWAN, SEGAL DAN
Format:	Patent
Sprache:	eng ; kor
Schlagworte:	APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBEMICROSCOPY [SPM] BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING PHYSICS SCANNING-PROBE TECHNIQUES OR APPARATUS SEMICONDUCTOR DEVICES TESTING
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Beschreibung
Zusammenfassung:	기판의 의심되는 결함들의 위치들을 결정하기 위한 방법, 비-일시적 컴퓨터 판독가능한 매체, 및 검출 시스템이 개시된다. A method, a non-transitory computer readable medium and a detection system for determining locations of suspected defects of a substrate.