ANTENA SEGMENT AND INDUCTIVE COUPLING PLASMA PROCESSING APPARATUS

The present invention relates to an antenna segment and an inductively coupling plasma processing device. The antenna segment formed by winding an antenna wire and forming a first plane by a part of the antenna wire comprises a first antenna line at least a part of which forms the first plane on one...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	SAITO HITOSHI, TOJO TOSHIHIRO
Format:	Patent
Sprache:	eng ; kor
Schlagworte:	ANTENNAS, i.e. RADIO AERIALS BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ELECTRICITY PLASMA TECHNIQUE PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OFNEUTRONS PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMICBEAMS
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